1/2/2011	10:40:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2011	10:40:59 AM	Recipe started at 10:40 AM
1/2/2011	10:40:59 AM	H2 valve closed
1/2/2011	10:40:59 AM	BCl3 valve closed
1/2/2011	10:40:59 AM	PH3 valve closed
1/2/2011	10:40:59 AM	SiCl4 pre valve closed
1/2/2011	10:40:59 AM	SiCl4 post valve closed
1/2/2011	10:40:59 AM	Main Vac valve closed
1/2/2011	10:40:59 AM	Bypass valve closed
1/2/2011	10:40:59 AM	Bubbler valve closed
1/2/2011	10:40:59 AM	Helium valve opened
1/2/2011	10:40:59 AM	Helium MFC set to  500.000000
1/2/2011	10:40:59 AM	H2 MFC set to  0.000000
1/2/2011	10:40:59 AM	BCl3 MFC set to  0.000000
1/2/2011	10:40:59 AM	PHl3 MFC set to  0.000000
1/2/2011	10:40:59 AM	SiCl4 MFC set to  0.000000
1/2/2011	10:40:59 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:41:00 AM	Tube furnace set to 0
1/2/2011	10:42:20 AM	Helium valve closed
1/2/2011	10:42:20 AM	H2 valve closed
1/2/2011	10:42:20 AM	BCl3 valve closed
1/2/2011	10:42:20 AM	PH3 valve closed
1/2/2011	10:42:20 AM	SiCl4 pre valve closed
1/2/2011	10:42:20 AM	SiCl4 post valve closed
1/2/2011	10:42:20 AM	Main Vac valve closed
1/2/2011	10:42:20 AM	Bypass valve closed
1/2/2011	10:42:20 AM	Bubbler valve closed
1/2/2011	10:42:20 AM	Helium MFC set to  0.000000
1/2/2011	10:42:20 AM	H2 MFC set to  0.000000
1/2/2011	10:42:20 AM	BCl3 MFC set to  0.000000
1/2/2011	10:42:20 AM	PHl3 MFC set to  0.000000
1/2/2011	10:42:20 AM	SiCl4 MFC set to  0.000000
1/2/2011	10:42:20 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:42:20 AM	Tube furnace set to 0
1/2/2011	10:42:21 AM	Run finished at 10:42 AM
1/2/2011	10:42:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2011	10:50:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	10:50:20 AM	Recipe started at 10:50 AM
1/2/2011	10:50:20 AM	Helium valve closed
1/2/2011	10:50:20 AM	H2 valve closed
1/2/2011	10:50:20 AM	BCl3 valve closed
1/2/2011	10:50:20 AM	PH3 valve closed
1/2/2011	10:50:20 AM	SiCl4 pre valve closed
1/2/2011	10:50:20 AM	SiCl4 post valve closed
1/2/2011	10:50:20 AM	Main Vac valve closed
1/2/2011	10:50:20 AM	Bubbler valve closed
1/2/2011	10:50:20 AM	Bypass valve opened
1/2/2011	10:50:20 AM	Helium MFC set to  0.000000
1/2/2011	10:50:20 AM	H2 MFC set to  0.000000
1/2/2011	10:50:20 AM	BCl3 MFC set to  0.000000
1/2/2011	10:50:20 AM	PHl3 MFC set to  0.000000
1/2/2011	10:50:20 AM	SiCl4 MFC set to  0.000000
1/2/2011	10:50:20 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:50:20 AM	Tube furnace set to 0
1/2/2011	10:51:18 AM	Helium valve closed
1/2/2011	10:51:18 AM	H2 valve closed
1/2/2011	10:51:18 AM	BCl3 valve closed
1/2/2011	10:51:18 AM	PH3 valve closed
1/2/2011	10:51:18 AM	SiCl4 pre valve closed
1/2/2011	10:51:18 AM	SiCl4 post valve closed
1/2/2011	10:51:18 AM	Bubbler valve closed
1/2/2011	10:51:18 AM	Main Vac valve opened
1/2/2011	10:51:18 AM	Bypass valve opened
1/2/2011	10:51:18 AM	Helium MFC set to  0.000000
1/2/2011	10:51:18 AM	H2 MFC set to  0.000000
1/2/2011	10:51:18 AM	BCl3 MFC set to  0.000000
1/2/2011	10:51:18 AM	PHl3 MFC set to  0.000000
1/2/2011	10:51:18 AM	SiCl4 MFC set to  0.000000
1/2/2011	10:51:18 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:51:18 AM	Tube furnace set to 0
1/2/2011	10:51:19 AM	Run finished at 10:51 AM
1/2/2011	10:51:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	11:00:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2011	11:00:32 AM	Recipe started at 11:00 AM
1/2/2011	11:00:32 AM	H2 valve closed
1/2/2011	11:00:32 AM	BCl3 valve closed
1/2/2011	11:00:32 AM	PH3 valve closed
1/2/2011	11:00:32 AM	SiCl4 pre valve closed
1/2/2011	11:00:32 AM	SiCl4 post valve closed
1/2/2011	11:00:32 AM	Main Vac valve closed
1/2/2011	11:00:32 AM	Bypass valve closed
1/2/2011	11:00:32 AM	Bubbler valve closed
1/2/2011	11:00:32 AM	Helium valve opened
1/2/2011	11:00:32 AM	Helium MFC set to  500.000000
1/2/2011	11:00:32 AM	H2 MFC set to  0.000000
1/2/2011	11:00:32 AM	BCl3 MFC set to  0.000000
1/2/2011	11:00:32 AM	PHl3 MFC set to  0.000000
1/2/2011	11:00:32 AM	SiCl4 MFC set to  0.000000
1/2/2011	11:00:32 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:00:33 AM	Tube furnace set to 0
1/2/2011	11:01:53 AM	Helium valve closed
1/2/2011	11:01:53 AM	H2 valve closed
1/2/2011	11:01:53 AM	BCl3 valve closed
1/2/2011	11:01:53 AM	PH3 valve closed
1/2/2011	11:01:53 AM	SiCl4 pre valve closed
1/2/2011	11:01:53 AM	SiCl4 post valve closed
1/2/2011	11:01:53 AM	Main Vac valve closed
1/2/2011	11:01:53 AM	Bypass valve closed
1/2/2011	11:01:53 AM	Bubbler valve closed
1/2/2011	11:01:53 AM	Helium MFC set to  0.000000
1/2/2011	11:01:53 AM	H2 MFC set to  0.000000
1/2/2011	11:01:53 AM	BCl3 MFC set to  0.000000
1/2/2011	11:01:53 AM	PHl3 MFC set to  0.000000
1/2/2011	11:01:53 AM	SiCl4 MFC set to  0.000000
1/2/2011	11:01:53 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:01:54 AM	Tube furnace set to 0
1/2/2011	11:01:54 AM	Run finished at 11:01 AM
1/2/2011	11:01:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2011	11:06:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	11:06:06 AM	Recipe started at 11:06 AM
1/2/2011	11:06:06 AM	Helium valve closed
1/2/2011	11:06:06 AM	H2 valve closed
1/2/2011	11:06:06 AM	BCl3 valve closed
1/2/2011	11:06:06 AM	PH3 valve closed
1/2/2011	11:06:06 AM	SiCl4 pre valve closed
1/2/2011	11:06:06 AM	SiCl4 post valve closed
1/2/2011	11:06:06 AM	Main Vac valve closed
1/2/2011	11:06:06 AM	Bubbler valve closed
1/2/2011	11:06:06 AM	Bypass valve opened
1/2/2011	11:06:06 AM	Helium MFC set to  0.000000
1/2/2011	11:06:06 AM	H2 MFC set to  0.000000
1/2/2011	11:06:06 AM	BCl3 MFC set to  0.000000
1/2/2011	11:06:06 AM	PHl3 MFC set to  0.000000
1/2/2011	11:06:06 AM	SiCl4 MFC set to  0.000000
1/2/2011	11:06:06 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:06:06 AM	Tube furnace set to 0
1/2/2011	11:07:04 AM	Helium valve closed
1/2/2011	11:07:04 AM	H2 valve closed
1/2/2011	11:07:04 AM	BCl3 valve closed
1/2/2011	11:07:04 AM	PH3 valve closed
1/2/2011	11:07:04 AM	SiCl4 pre valve closed
1/2/2011	11:07:04 AM	SiCl4 post valve closed
1/2/2011	11:07:04 AM	Bubbler valve closed
1/2/2011	11:07:04 AM	Main Vac valve opened
1/2/2011	11:07:04 AM	Bypass valve opened
1/2/2011	11:07:04 AM	Helium MFC set to  0.000000
1/2/2011	11:07:04 AM	H2 MFC set to  0.000000
1/2/2011	11:07:04 AM	BCl3 MFC set to  0.000000
1/2/2011	11:07:04 AM	PHl3 MFC set to  0.000000
1/2/2011	11:07:04 AM	SiCl4 MFC set to  0.000000
1/2/2011	11:07:04 AM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:07:04 AM	Tube furnace set to 0
1/2/2011	11:07:04 AM	Run finished at 11:07 AM
1/2/2011	11:07:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	11:11:19 AM	Helium MFC set to  10.000000
1/2/2011	11:11:20 AM	Helium valve opened
1/2/2011	11:12:29 AM	Helium valve closed
1/2/2011	11:12:33 AM	Helium MFC set to  20.000000
1/2/2011	11:12:34 AM	Helium valve opened
1/2/2011	11:26:31 AM	Helium valve closed
1/2/2011	11:27:37 AM	Helium valve opened
1/2/2011	12:02:40 PM	Helium valve closed
1/2/2011	12:04:20 PM	Recipe started at 12:04 PM
1/2/2011	12:04:20 PM	Helium valve closed
1/2/2011	12:04:20 PM	BCl3 valve closed
1/2/2011	12:04:20 PM	PH3 valve closed
1/2/2011	12:04:20 PM	SiCl4 pre valve closed
1/2/2011	12:04:20 PM	SiCl4 post valve closed
1/2/2011	12:04:20 PM	Main Vac valve closed
1/2/2011	12:04:20 PM	Bypass valve closed
1/2/2011	12:04:20 PM	Bubbler valve closed
1/2/2011	12:04:20 PM	H2 valve opened
1/2/2011	12:04:20 PM	Helium MFC set to  0.000000
1/2/2011	12:04:20 PM	H2 MFC set to  500.000000
1/2/2011	12:04:20 PM	BCl3 MFC set to  0.000000
1/2/2011	12:04:20 PM	PHl3 MFC set to  0.000000
1/2/2011	12:04:20 PM	SiCl4 MFC set to  0.000000
1/2/2011	12:04:20 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	12:04:20 PM	Tube furnace set to 100
1/2/2011	12:05:43 PM	Helium valve closed
1/2/2011	12:05:44 PM	BCl3 valve closed
1/2/2011	12:05:44 PM	PH3 valve closed
1/2/2011	12:05:44 PM	SiCl4 pre valve closed
1/2/2011	12:05:44 PM	SiCl4 post valve closed
1/2/2011	12:05:44 PM	Main Vac valve closed
1/2/2011	12:05:44 PM	Bypass valve closed
1/2/2011	12:05:44 PM	H2 valve opened
1/2/2011	12:05:44 PM	Bubbler valve opened
1/2/2011	12:05:44 PM	Helium MFC set to  0.000000
1/2/2011	12:05:44 PM	H2 MFC set to  500.000000
1/2/2011	12:05:44 PM	BCl3 MFC set to  0.000000
1/2/2011	12:05:44 PM	PHl3 MFC set to  0.000000
1/2/2011	12:05:44 PM	SiCl4 MFC set to  0.000000
1/2/2011	12:05:44 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	12:05:44 PM	Tube furnace set to 1000
1/2/2011	12:25:44 PM	Helium valve closed
1/2/2011	12:25:44 PM	BCl3 valve closed
1/2/2011	12:25:44 PM	PH3 valve closed
1/2/2011	12:25:44 PM	Main Vac valve closed
1/2/2011	12:25:44 PM	Bypass valve closed
1/2/2011	12:25:44 PM	H2 valve opened
1/2/2011	12:25:44 PM	SiCl4 pre valve opened
1/2/2011	12:25:44 PM	SiCl4 post valve opened
1/2/2011	12:25:44 PM	Bubbler valve opened
1/2/2011	12:25:44 PM	Helium MFC set to  0.000000
1/2/2011	12:25:44 PM	H2 MFC set to  500.000000
1/2/2011	12:25:44 PM	BCl3 MFC set to  0.000000
1/2/2011	12:25:44 PM	PHl3 MFC set to  0.000000
1/2/2011	12:25:44 PM	SiCl4 MFC set to  50.000000
1/2/2011	12:25:44 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	12:25:44 PM	Tube furnace set to 1000
1/2/2011	12:45:44 PM	H2 valve closed
1/2/2011	12:45:44 PM	BCl3 valve closed
1/2/2011	12:45:44 PM	PH3 valve closed
1/2/2011	12:45:44 PM	SiCl4 pre valve closed
1/2/2011	12:45:44 PM	SiCl4 post valve closed
1/2/2011	12:45:44 PM	Main Vac valve closed
1/2/2011	12:45:44 PM	Bypass valve closed
1/2/2011	12:45:44 PM	Helium valve opened
1/2/2011	12:45:44 PM	Bubbler valve opened
1/2/2011	12:45:44 PM	Helium MFC set to  500.000000
1/2/2011	12:45:44 PM	H2 MFC set to  0.000000
1/2/2011	12:45:44 PM	BCl3 MFC set to  0.000000
1/2/2011	12:45:44 PM	PHl3 MFC set to  0.000000
1/2/2011	12:45:44 PM	SiCl4 MFC set to  0.000000
1/2/2011	12:45:44 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	12:45:44 PM	Tube furnace set to 0
1/2/2011	1:12:36 PM	Helium valve closed
1/2/2011	1:12:36 PM	H2 valve closed
1/2/2011	1:12:36 PM	BCl3 valve closed
1/2/2011	1:12:36 PM	PH3 valve closed
1/2/2011	1:12:36 PM	SiCl4 pre valve closed
1/2/2011	1:12:36 PM	SiCl4 post valve closed
1/2/2011	1:12:36 PM	Main Vac valve closed
1/2/2011	1:12:36 PM	Bypass valve closed
1/2/2011	1:12:36 PM	Bubbler valve closed
1/2/2011	1:12:36 PM	Helium MFC set to  0.000000
1/2/2011	1:12:36 PM	H2 MFC set to  0.000000
1/2/2011	1:12:36 PM	BCl3 MFC set to  0.000000
1/2/2011	1:12:36 PM	PHl3 MFC set to  0.000000
1/2/2011	1:12:36 PM	SiCl4 MFC set to  0.000000
1/2/2011	1:12:36 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	1:12:36 PM	Tube furnace set to 0
1/2/2011	1:12:37 PM	Run finished at 1:12 PM
1/2/2011	1:18:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	1:18:56 PM	Recipe started at 1:18 PM
1/2/2011	1:18:57 PM	Helium valve closed
1/2/2011	1:18:57 PM	H2 valve closed
1/2/2011	1:18:57 PM	BCl3 valve closed
1/2/2011	1:18:57 PM	PH3 valve closed
1/2/2011	1:18:57 PM	SiCl4 pre valve closed
1/2/2011	1:18:57 PM	SiCl4 post valve closed
1/2/2011	1:18:57 PM	Main Vac valve closed
1/2/2011	1:18:57 PM	Bubbler valve closed
1/2/2011	1:18:57 PM	Bypass valve opened
1/2/2011	1:18:57 PM	Helium MFC set to  0.000000
1/2/2011	1:18:57 PM	H2 MFC set to  0.000000
1/2/2011	1:18:57 PM	BCl3 MFC set to  0.000000
1/2/2011	1:18:57 PM	PHl3 MFC set to  0.000000
1/2/2011	1:18:57 PM	SiCl4 MFC set to  0.000000
1/2/2011	1:18:57 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	1:18:57 PM	Tube furnace set to 0
1/2/2011	1:19:57 PM	Helium valve closed
1/2/2011	1:19:57 PM	H2 valve closed
1/2/2011	1:19:57 PM	BCl3 valve closed
1/2/2011	1:19:57 PM	PH3 valve closed
1/2/2011	1:19:57 PM	SiCl4 pre valve closed
1/2/2011	1:19:57 PM	SiCl4 post valve closed
1/2/2011	1:19:57 PM	Bubbler valve closed
1/2/2011	1:19:58 PM	Main Vac valve opened
1/2/2011	1:19:58 PM	Bypass valve opened
1/2/2011	1:19:58 PM	Helium MFC set to  0.000000
1/2/2011	1:19:58 PM	H2 MFC set to  0.000000
1/2/2011	1:19:58 PM	BCl3 MFC set to  0.000000
1/2/2011	1:19:58 PM	PHl3 MFC set to  0.000000
1/2/2011	1:19:58 PM	SiCl4 MFC set to  0.000000
1/2/2011	1:19:58 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	1:19:58 PM	Tube furnace set to 0
1/2/2011	1:19:58 PM	Run finished at 1:19 PM
1/2/2011	1:19:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	1:20:08 PM	Helium MFC set to  30.000000
1/2/2011	1:20:09 PM	Helium valve opened
1/2/2011	1:31:46 PM	Helium valve closed
1/2/2011	1:32:31 PM	Helium valve opened
1/2/2011	1:45:48 PM	Helium valve closed
1/2/2011	1:47:42 PM	Recipe started at 1:47 PM
1/2/2011	1:47:42 PM	Helium valve closed
1/2/2011	1:47:42 PM	BCl3 valve closed
1/2/2011	1:47:42 PM	PH3 valve closed
1/2/2011	1:47:42 PM	SiCl4 pre valve closed
1/2/2011	1:47:42 PM	SiCl4 post valve closed
1/2/2011	1:47:42 PM	Main Vac valve closed
1/2/2011	1:47:42 PM	Bypass valve closed
1/2/2011	1:47:42 PM	Bubbler valve closed
1/2/2011	1:47:42 PM	H2 valve opened
1/2/2011	1:47:42 PM	Helium MFC set to  0.000000
1/2/2011	1:47:42 PM	H2 MFC set to  500.000000
1/2/2011	1:47:42 PM	BCl3 MFC set to  0.000000
1/2/2011	1:47:42 PM	PHl3 MFC set to  0.000000
1/2/2011	1:47:42 PM	SiCl4 MFC set to  0.000000
1/2/2011	1:47:42 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	1:47:43 PM	Tube furnace set to 100
1/2/2011	1:49:05 PM	Helium valve closed
1/2/2011	1:49:05 PM	BCl3 valve closed
1/2/2011	1:49:05 PM	PH3 valve closed
1/2/2011	1:49:05 PM	SiCl4 pre valve closed
1/2/2011	1:49:05 PM	SiCl4 post valve closed
1/2/2011	1:49:05 PM	Main Vac valve closed
1/2/2011	1:49:05 PM	Bypass valve closed
1/2/2011	1:49:05 PM	H2 valve opened
1/2/2011	1:49:05 PM	Bubbler valve opened
1/2/2011	1:49:05 PM	Helium MFC set to  0.000000
1/2/2011	1:49:05 PM	H2 MFC set to  500.000000
1/2/2011	1:49:05 PM	BCl3 MFC set to  0.000000
1/2/2011	1:49:05 PM	PHl3 MFC set to  0.000000
1/2/2011	1:49:05 PM	SiCl4 MFC set to  0.000000
1/2/2011	1:49:05 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	1:49:05 PM	Tube furnace set to 1000
1/2/2011	2:09:05 PM	Helium valve closed
1/2/2011	2:09:05 PM	BCl3 valve closed
1/2/2011	2:09:05 PM	PH3 valve closed
1/2/2011	2:09:05 PM	Main Vac valve closed
1/2/2011	2:09:05 PM	Bypass valve closed
1/2/2011	2:09:05 PM	H2 valve opened
1/2/2011	2:09:05 PM	SiCl4 pre valve opened
1/2/2011	2:09:05 PM	SiCl4 post valve opened
1/2/2011	2:09:05 PM	Bubbler valve opened
1/2/2011	2:09:05 PM	Helium MFC set to  0.000000
1/2/2011	2:09:05 PM	H2 MFC set to  500.000000
1/2/2011	2:09:05 PM	BCl3 MFC set to  0.000000
1/2/2011	2:09:05 PM	PHl3 MFC set to  0.000000
1/2/2011	2:09:05 PM	SiCl4 MFC set to  50.000000
1/2/2011	2:09:05 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	2:09:05 PM	Tube furnace set to 1000
1/2/2011	2:29:05 PM	H2 valve closed
1/2/2011	2:29:05 PM	BCl3 valve closed
1/2/2011	2:29:05 PM	PH3 valve closed
1/2/2011	2:29:05 PM	SiCl4 pre valve closed
1/2/2011	2:29:05 PM	SiCl4 post valve closed
1/2/2011	2:29:05 PM	Main Vac valve closed
1/2/2011	2:29:05 PM	Bypass valve closed
1/2/2011	2:29:05 PM	Helium valve opened
1/2/2011	2:29:05 PM	Bubbler valve opened
1/2/2011	2:29:05 PM	Helium MFC set to  500.000000
1/2/2011	2:29:05 PM	H2 MFC set to  0.000000
1/2/2011	2:29:05 PM	BCl3 MFC set to  0.000000
1/2/2011	2:29:05 PM	PHl3 MFC set to  0.000000
1/2/2011	2:29:05 PM	SiCl4 MFC set to  0.000000
1/2/2011	2:29:05 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	2:29:05 PM	Tube furnace set to 0
1/2/2011	2:55:34 PM	Helium valve closed
1/2/2011	2:55:34 PM	H2 valve closed
1/2/2011	2:55:34 PM	BCl3 valve closed
1/2/2011	2:55:34 PM	PH3 valve closed
1/2/2011	2:55:34 PM	SiCl4 pre valve closed
1/2/2011	2:55:34 PM	SiCl4 post valve closed
1/2/2011	2:55:34 PM	Main Vac valve closed
1/2/2011	2:55:34 PM	Bypass valve closed
1/2/2011	2:55:34 PM	Bubbler valve closed
1/2/2011	2:55:34 PM	Helium MFC set to  0.000000
1/2/2011	2:55:34 PM	H2 MFC set to  0.000000
1/2/2011	2:55:34 PM	BCl3 MFC set to  0.000000
1/2/2011	2:55:34 PM	PHl3 MFC set to  0.000000
1/2/2011	2:55:34 PM	SiCl4 MFC set to  0.000000
1/2/2011	2:55:34 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	2:55:34 PM	Tube furnace set to 0
1/2/2011	2:55:34 PM	Run finished at 2:55 PM
1/2/2011	2:59:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	2:59:38 PM	Recipe started at 2:59 PM
1/2/2011	2:59:38 PM	Helium valve closed
1/2/2011	2:59:38 PM	H2 valve closed
1/2/2011	2:59:38 PM	BCl3 valve closed
1/2/2011	2:59:38 PM	PH3 valve closed
1/2/2011	2:59:38 PM	SiCl4 pre valve closed
1/2/2011	2:59:38 PM	SiCl4 post valve closed
1/2/2011	2:59:38 PM	Main Vac valve closed
1/2/2011	2:59:38 PM	Bubbler valve closed
1/2/2011	2:59:38 PM	Bypass valve opened
1/2/2011	2:59:38 PM	Helium MFC set to  0.000000
1/2/2011	2:59:38 PM	H2 MFC set to  0.000000
1/2/2011	2:59:38 PM	BCl3 MFC set to  0.000000
1/2/2011	2:59:38 PM	PHl3 MFC set to  0.000000
1/2/2011	2:59:38 PM	SiCl4 MFC set to  0.000000
1/2/2011	2:59:38 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	2:59:39 PM	Tube furnace set to 0
1/2/2011	3:00:38 PM	Helium valve closed
1/2/2011	3:00:38 PM	H2 valve closed
1/2/2011	3:00:38 PM	BCl3 valve closed
1/2/2011	3:00:38 PM	PH3 valve closed
1/2/2011	3:00:38 PM	SiCl4 pre valve closed
1/2/2011	3:00:38 PM	SiCl4 post valve closed
1/2/2011	3:00:38 PM	Bubbler valve closed
1/2/2011	3:00:38 PM	Main Vac valve opened
1/2/2011	3:00:38 PM	Bypass valve opened
1/2/2011	3:00:38 PM	Helium MFC set to  0.000000
1/2/2011	3:00:38 PM	H2 MFC set to  0.000000
1/2/2011	3:00:38 PM	BCl3 MFC set to  0.000000
1/2/2011	3:00:38 PM	PHl3 MFC set to  0.000000
1/2/2011	3:00:38 PM	SiCl4 MFC set to  0.000000
1/2/2011	3:00:38 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	3:00:39 PM	Tube furnace set to 0
1/2/2011	3:00:39 PM	Run finished at 3:00 PM
1/2/2011	3:00:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	3:00:46 PM	Helium MFC set to  10.000000
1/2/2011	3:00:46 PM	Helium valve opened
1/2/2011	3:02:25 PM	Helium valve closed
1/2/2011	4:30:13 PM	Helium MFC set to  40.000000
1/2/2011	4:30:13 PM	Helium valve opened
1/2/2011	4:44:36 PM	Helium valve closed
1/2/2011	4:45:51 PM	Recipe started at 4:45 PM
1/2/2011	4:45:51 PM	Helium valve closed
1/2/2011	4:45:51 PM	BCl3 valve closed
1/2/2011	4:45:51 PM	PH3 valve closed
1/2/2011	4:45:51 PM	SiCl4 pre valve closed
1/2/2011	4:45:51 PM	SiCl4 post valve closed
1/2/2011	4:45:51 PM	Main Vac valve closed
1/2/2011	4:45:51 PM	Bypass valve closed
1/2/2011	4:45:51 PM	Bubbler valve closed
1/2/2011	4:45:51 PM	H2 valve opened
1/2/2011	4:45:51 PM	Helium MFC set to  0.000000
1/2/2011	4:45:51 PM	H2 MFC set to  500.000000
1/2/2011	4:45:51 PM	BCl3 MFC set to  0.000000
1/2/2011	4:45:51 PM	PHl3 MFC set to  0.000000
1/2/2011	4:45:51 PM	SiCl4 MFC set to  0.000000
1/2/2011	4:45:51 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	4:45:51 PM	Tube furnace set to 100
1/2/2011	4:47:14 PM	Helium valve closed
1/2/2011	4:47:14 PM	BCl3 valve closed
1/2/2011	4:47:14 PM	PH3 valve closed
1/2/2011	4:47:14 PM	SiCl4 pre valve closed
1/2/2011	4:47:14 PM	SiCl4 post valve closed
1/2/2011	4:47:14 PM	Main Vac valve closed
1/2/2011	4:47:14 PM	Bypass valve closed
1/2/2011	4:47:14 PM	H2 valve opened
1/2/2011	4:47:14 PM	Bubbler valve opened
1/2/2011	4:47:14 PM	Helium MFC set to  0.000000
1/2/2011	4:47:14 PM	H2 MFC set to  500.000000
1/2/2011	4:47:14 PM	BCl3 MFC set to  0.000000
1/2/2011	4:47:14 PM	PHl3 MFC set to  0.000000
1/2/2011	4:47:14 PM	SiCl4 MFC set to  0.000000
1/2/2011	4:47:14 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	4:47:14 PM	Tube furnace set to 1000
1/2/2011	5:07:14 PM	Helium valve closed
1/2/2011	5:07:14 PM	BCl3 valve closed
1/2/2011	5:07:14 PM	PH3 valve closed
1/2/2011	5:07:14 PM	Main Vac valve closed
1/2/2011	5:07:14 PM	Bypass valve closed
1/2/2011	5:07:14 PM	H2 valve opened
1/2/2011	5:07:14 PM	SiCl4 pre valve opened
1/2/2011	5:07:14 PM	SiCl4 post valve opened
1/2/2011	5:07:14 PM	Bubbler valve opened
1/2/2011	5:07:14 PM	Helium MFC set to  0.000000
1/2/2011	5:07:14 PM	H2 MFC set to  500.000000
1/2/2011	5:07:14 PM	BCl3 MFC set to  0.000000
1/2/2011	5:07:14 PM	PHl3 MFC set to  0.000000
1/2/2011	5:07:14 PM	SiCl4 MFC set to  50.000000
1/2/2011	5:07:14 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	5:07:14 PM	Tube furnace set to 1000
1/2/2011	5:27:15 PM	H2 valve closed
1/2/2011	5:27:15 PM	BCl3 valve closed
1/2/2011	5:27:15 PM	PH3 valve closed
1/2/2011	5:27:15 PM	SiCl4 pre valve closed
1/2/2011	5:27:15 PM	SiCl4 post valve closed
1/2/2011	5:27:15 PM	Main Vac valve closed
1/2/2011	5:27:15 PM	Bypass valve closed
1/2/2011	5:27:15 PM	Helium valve opened
1/2/2011	5:27:15 PM	Bubbler valve opened
1/2/2011	5:27:15 PM	Helium MFC set to  500.000000
1/2/2011	5:27:15 PM	H2 MFC set to  0.000000
1/2/2011	5:27:15 PM	BCl3 MFC set to  0.000000
1/2/2011	5:27:15 PM	PHl3 MFC set to  0.000000
1/2/2011	5:27:15 PM	SiCl4 MFC set to  0.000000
1/2/2011	5:27:15 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	5:27:15 PM	Tube furnace set to 0
1/2/2011	6:17:15 PM	Helium valve closed
1/2/2011	6:17:15 PM	H2 valve closed
1/2/2011	6:17:15 PM	BCl3 valve closed
1/2/2011	6:17:15 PM	PH3 valve closed
1/2/2011	6:17:15 PM	SiCl4 pre valve closed
1/2/2011	6:17:15 PM	SiCl4 post valve closed
1/2/2011	6:17:15 PM	Main Vac valve closed
1/2/2011	6:17:15 PM	Bypass valve closed
1/2/2011	6:17:15 PM	Bubbler valve closed
1/2/2011	6:17:15 PM	Helium MFC set to  0.000000
1/2/2011	6:17:15 PM	H2 MFC set to  0.000000
1/2/2011	6:17:15 PM	BCl3 MFC set to  0.000000
1/2/2011	6:17:15 PM	PHl3 MFC set to  0.000000
1/2/2011	6:17:15 PM	SiCl4 MFC set to  0.000000
1/2/2011	6:17:15 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	6:17:15 PM	Tube furnace set to 0
1/2/2011	6:17:15 PM	Run finished at 6:17 PM
1/2/2011	6:24:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	6:24:23 PM	Recipe started at 6:24 PM
1/2/2011	6:24:23 PM	Helium valve closed
1/2/2011	6:24:23 PM	H2 valve closed
1/2/2011	6:24:23 PM	BCl3 valve closed
1/2/2011	6:24:23 PM	PH3 valve closed
1/2/2011	6:24:23 PM	SiCl4 pre valve closed
1/2/2011	6:24:23 PM	SiCl4 post valve closed
1/2/2011	6:24:23 PM	Main Vac valve closed
1/2/2011	6:24:23 PM	Bubbler valve closed
1/2/2011	6:24:23 PM	Bypass valve opened
1/2/2011	6:24:23 PM	Helium MFC set to  0.000000
1/2/2011	6:24:23 PM	H2 MFC set to  0.000000
1/2/2011	6:24:23 PM	BCl3 MFC set to  0.000000
1/2/2011	6:24:23 PM	PHl3 MFC set to  0.000000
1/2/2011	6:24:23 PM	SiCl4 MFC set to  0.000000
1/2/2011	6:24:23 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	6:24:23 PM	Tube furnace set to 0
1/2/2011	6:25:25 PM	Helium valve closed
1/2/2011	6:25:25 PM	H2 valve closed
1/2/2011	6:25:25 PM	BCl3 valve closed
1/2/2011	6:25:25 PM	PH3 valve closed
1/2/2011	6:25:25 PM	SiCl4 pre valve closed
1/2/2011	6:25:25 PM	SiCl4 post valve closed
1/2/2011	6:25:25 PM	Bubbler valve closed
1/2/2011	6:25:25 PM	Main Vac valve opened
1/2/2011	6:25:25 PM	Bypass valve opened
1/2/2011	6:25:25 PM	Helium MFC set to  0.000000
1/2/2011	6:25:25 PM	H2 MFC set to  0.000000
1/2/2011	6:25:25 PM	BCl3 MFC set to  0.000000
1/2/2011	6:25:25 PM	PHl3 MFC set to  0.000000
1/2/2011	6:25:25 PM	SiCl4 MFC set to  0.000000
1/2/2011	6:25:25 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	6:25:25 PM	Tube furnace set to 0
1/2/2011	6:25:25 PM	Run finished at 6:25 PM
1/2/2011	6:25:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	6:31:41 PM	Helium MFC set to  20.000000
1/2/2011	6:31:42 PM	Helium valve opened
1/2/2011	6:56:21 PM	Helium valve closed
1/2/2011	7:51:01 PM	Helium MFC set to  30.000000
1/2/2011	7:51:02 PM	Helium valve opened
1/2/2011	8:00:02 PM	Helium valve closed
1/2/2011	8:00:50 PM	Recipe started at 8:00 PM
1/2/2011	8:00:50 PM	Helium valve closed
1/2/2011	8:00:50 PM	BCl3 valve closed
1/2/2011	8:00:50 PM	PH3 valve closed
1/2/2011	8:00:50 PM	SiCl4 pre valve closed
1/2/2011	8:00:50 PM	SiCl4 post valve closed
1/2/2011	8:00:50 PM	Main Vac valve closed
1/2/2011	8:00:50 PM	Bypass valve closed
1/2/2011	8:00:50 PM	Bubbler valve closed
1/2/2011	8:00:50 PM	H2 valve opened
1/2/2011	8:00:50 PM	Helium MFC set to  0.000000
1/2/2011	8:00:50 PM	H2 MFC set to  500.000000
1/2/2011	8:00:50 PM	BCl3 MFC set to  0.000000
1/2/2011	8:00:50 PM	PHl3 MFC set to  0.000000
1/2/2011	8:00:50 PM	SiCl4 MFC set to  0.000000
1/2/2011	8:00:50 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	8:00:50 PM	Tube furnace set to 100
1/2/2011	8:02:13 PM	Helium valve closed
1/2/2011	8:02:13 PM	BCl3 valve closed
1/2/2011	8:02:13 PM	PH3 valve closed
1/2/2011	8:02:13 PM	SiCl4 pre valve closed
1/2/2011	8:02:13 PM	SiCl4 post valve closed
1/2/2011	8:02:13 PM	Main Vac valve closed
1/2/2011	8:02:13 PM	Bypass valve closed
1/2/2011	8:02:13 PM	H2 valve opened
1/2/2011	8:02:13 PM	Bubbler valve opened
1/2/2011	8:02:13 PM	Helium MFC set to  0.000000
1/2/2011	8:02:13 PM	H2 MFC set to  500.000000
1/2/2011	8:02:13 PM	BCl3 MFC set to  0.000000
1/2/2011	8:02:13 PM	PHl3 MFC set to  0.000000
1/2/2011	8:02:13 PM	SiCl4 MFC set to  0.000000
1/2/2011	8:02:13 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	8:02:13 PM	Tube furnace set to 1000
1/2/2011	8:22:13 PM	Helium valve closed
1/2/2011	8:22:14 PM	BCl3 valve closed
1/2/2011	8:22:14 PM	PH3 valve closed
1/2/2011	8:22:14 PM	Main Vac valve closed
1/2/2011	8:22:14 PM	Bypass valve closed
1/2/2011	8:22:14 PM	H2 valve opened
1/2/2011	8:22:14 PM	SiCl4 pre valve opened
1/2/2011	8:22:14 PM	SiCl4 post valve opened
1/2/2011	8:22:14 PM	Bubbler valve opened
1/2/2011	8:22:14 PM	Helium MFC set to  0.000000
1/2/2011	8:22:14 PM	H2 MFC set to  500.000000
1/2/2011	8:22:14 PM	BCl3 MFC set to  0.000000
1/2/2011	8:22:14 PM	PHl3 MFC set to  0.000000
1/2/2011	8:22:14 PM	SiCl4 MFC set to  50.000000
1/2/2011	8:22:14 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	8:22:14 PM	Tube furnace set to 1000
1/2/2011	8:42:14 PM	H2 valve closed
1/2/2011	8:42:14 PM	BCl3 valve closed
1/2/2011	8:42:14 PM	PH3 valve closed
1/2/2011	8:42:14 PM	SiCl4 pre valve closed
1/2/2011	8:42:14 PM	SiCl4 post valve closed
1/2/2011	8:42:14 PM	Main Vac valve closed
1/2/2011	8:42:14 PM	Bypass valve closed
1/2/2011	8:42:14 PM	Helium valve opened
1/2/2011	8:42:14 PM	Bubbler valve opened
1/2/2011	8:42:14 PM	Helium MFC set to  500.000000
1/2/2011	8:42:14 PM	H2 MFC set to  0.000000
1/2/2011	8:42:14 PM	BCl3 MFC set to  0.000000
1/2/2011	8:42:14 PM	PHl3 MFC set to  0.000000
1/2/2011	8:42:14 PM	SiCl4 MFC set to  0.000000
1/2/2011	8:42:14 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	8:42:14 PM	Tube furnace set to 0
1/2/2011	9:17:23 PM	Helium valve closed
1/2/2011	9:17:23 PM	H2 valve closed
1/2/2011	9:17:23 PM	BCl3 valve closed
1/2/2011	9:17:23 PM	PH3 valve closed
1/2/2011	9:17:23 PM	SiCl4 pre valve closed
1/2/2011	9:17:23 PM	SiCl4 post valve closed
1/2/2011	9:17:23 PM	Main Vac valve closed
1/2/2011	9:17:23 PM	Bypass valve closed
1/2/2011	9:17:23 PM	Bubbler valve closed
1/2/2011	9:17:23 PM	Helium MFC set to  0.000000
1/2/2011	9:17:23 PM	H2 MFC set to  0.000000
1/2/2011	9:17:23 PM	BCl3 MFC set to  0.000000
1/2/2011	9:17:23 PM	PHl3 MFC set to  0.000000
1/2/2011	9:17:23 PM	SiCl4 MFC set to  0.000000
1/2/2011	9:17:23 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	9:17:24 PM	Tube furnace set to 0
1/2/2011	9:17:24 PM	Run finished at 9:17 PM
1/2/2011	9:21:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	9:21:18 PM	Recipe started at 9:21 PM
1/2/2011	9:21:18 PM	Helium valve closed
1/2/2011	9:21:18 PM	H2 valve closed
1/2/2011	9:21:18 PM	BCl3 valve closed
1/2/2011	9:21:18 PM	PH3 valve closed
1/2/2011	9:21:18 PM	SiCl4 pre valve closed
1/2/2011	9:21:18 PM	SiCl4 post valve closed
1/2/2011	9:21:18 PM	Main Vac valve closed
1/2/2011	9:21:18 PM	Bubbler valve closed
1/2/2011	9:21:18 PM	Bypass valve opened
1/2/2011	9:21:18 PM	Helium MFC set to  0.000000
1/2/2011	9:21:18 PM	H2 MFC set to  0.000000
1/2/2011	9:21:18 PM	BCl3 MFC set to  0.000000
1/2/2011	9:21:18 PM	PHl3 MFC set to  0.000000
1/2/2011	9:21:18 PM	SiCl4 MFC set to  0.000000
1/2/2011	9:21:18 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	9:21:19 PM	Tube furnace set to 0
1/2/2011	9:22:19 PM	Helium valve closed
1/2/2011	9:22:19 PM	H2 valve closed
1/2/2011	9:22:19 PM	BCl3 valve closed
1/2/2011	9:22:19 PM	PH3 valve closed
1/2/2011	9:22:19 PM	SiCl4 pre valve closed
1/2/2011	9:22:19 PM	SiCl4 post valve closed
1/2/2011	9:22:19 PM	Bubbler valve closed
1/2/2011	9:22:19 PM	Main Vac valve opened
1/2/2011	9:22:19 PM	Bypass valve opened
1/2/2011	9:22:19 PM	Helium MFC set to  0.000000
1/2/2011	9:22:19 PM	H2 MFC set to  0.000000
1/2/2011	9:22:19 PM	BCl3 MFC set to  0.000000
1/2/2011	9:22:19 PM	PHl3 MFC set to  0.000000
1/2/2011	9:22:19 PM	SiCl4 MFC set to  0.000000
1/2/2011	9:22:19 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	9:22:19 PM	Tube furnace set to 0
1/2/2011	9:22:19 PM	Run finished at 9:22 PM
1/2/2011	9:22:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	9:22:40 PM	Helium MFC set to  10.000000
1/2/2011	9:22:41 PM	Helium valve opened
1/2/2011	9:50:20 PM	Helium valve closed
1/2/2011	9:52:07 PM	Helium MFC set to  20.000000
1/2/2011	9:52:07 PM	Helium valve opened
1/2/2011	10:08:52 PM	Helium valve closed
1/2/2011	10:09:37 PM	Recipe started at 10:09 PM
1/2/2011	10:09:37 PM	Helium valve closed
1/2/2011	10:09:37 PM	BCl3 valve closed
1/2/2011	10:09:37 PM	PH3 valve closed
1/2/2011	10:09:37 PM	SiCl4 pre valve closed
1/2/2011	10:09:37 PM	SiCl4 post valve closed
1/2/2011	10:09:37 PM	Main Vac valve closed
1/2/2011	10:09:37 PM	Bypass valve closed
1/2/2011	10:09:37 PM	Bubbler valve closed
1/2/2011	10:09:37 PM	H2 valve opened
1/2/2011	10:09:37 PM	Helium MFC set to  0.000000
1/2/2011	10:09:37 PM	H2 MFC set to  500.000000
1/2/2011	10:09:37 PM	BCl3 MFC set to  0.000000
1/2/2011	10:09:37 PM	PHl3 MFC set to  0.000000
1/2/2011	10:09:37 PM	SiCl4 MFC set to  0.000000
1/2/2011	10:09:37 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:09:37 PM	Tube furnace set to 100
1/2/2011	10:11:00 PM	Helium valve closed
1/2/2011	10:11:00 PM	BCl3 valve closed
1/2/2011	10:11:00 PM	PH3 valve closed
1/2/2011	10:11:00 PM	SiCl4 pre valve closed
1/2/2011	10:11:00 PM	SiCl4 post valve closed
1/2/2011	10:11:00 PM	Main Vac valve closed
1/2/2011	10:11:00 PM	Bypass valve closed
1/2/2011	10:11:00 PM	H2 valve opened
1/2/2011	10:11:00 PM	Bubbler valve opened
1/2/2011	10:11:00 PM	Helium MFC set to  0.000000
1/2/2011	10:11:00 PM	H2 MFC set to  500.000000
1/2/2011	10:11:00 PM	BCl3 MFC set to  0.000000
1/2/2011	10:11:00 PM	PHl3 MFC set to  0.000000
1/2/2011	10:11:00 PM	SiCl4 MFC set to  0.000000
1/2/2011	10:11:00 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:11:00 PM	Tube furnace set to 1000
1/2/2011	10:31:00 PM	Helium valve closed
1/2/2011	10:31:00 PM	BCl3 valve closed
1/2/2011	10:31:00 PM	PH3 valve closed
1/2/2011	10:31:00 PM	Main Vac valve closed
1/2/2011	10:31:00 PM	Bypass valve closed
1/2/2011	10:31:00 PM	H2 valve opened
1/2/2011	10:31:00 PM	SiCl4 pre valve opened
1/2/2011	10:31:00 PM	SiCl4 post valve opened
1/2/2011	10:31:00 PM	Bubbler valve opened
1/2/2011	10:31:00 PM	Helium MFC set to  0.000000
1/2/2011	10:31:00 PM	H2 MFC set to  500.000000
1/2/2011	10:31:00 PM	BCl3 MFC set to  0.000000
1/2/2011	10:31:00 PM	PHl3 MFC set to  0.000000
1/2/2011	10:31:00 PM	SiCl4 MFC set to  50.000000
1/2/2011	10:31:00 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:31:00 PM	Tube furnace set to 1000
1/2/2011	10:51:00 PM	H2 valve closed
1/2/2011	10:51:00 PM	BCl3 valve closed
1/2/2011	10:51:00 PM	PH3 valve closed
1/2/2011	10:51:00 PM	SiCl4 pre valve closed
1/2/2011	10:51:00 PM	SiCl4 post valve closed
1/2/2011	10:51:00 PM	Main Vac valve closed
1/2/2011	10:51:00 PM	Bypass valve closed
1/2/2011	10:51:00 PM	Helium valve opened
1/2/2011	10:51:00 PM	Bubbler valve opened
1/2/2011	10:51:00 PM	Helium MFC set to  500.000000
1/2/2011	10:51:00 PM	H2 MFC set to  0.000000
1/2/2011	10:51:00 PM	BCl3 MFC set to  0.000000
1/2/2011	10:51:00 PM	PHl3 MFC set to  0.000000
1/2/2011	10:51:00 PM	SiCl4 MFC set to  0.000000
1/2/2011	10:51:00 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	10:51:00 PM	Tube furnace set to 0
1/2/2011	11:26:41 PM	Helium valve closed
1/2/2011	11:26:41 PM	H2 valve closed
1/2/2011	11:26:41 PM	BCl3 valve closed
1/2/2011	11:26:41 PM	PH3 valve closed
1/2/2011	11:26:41 PM	SiCl4 pre valve closed
1/2/2011	11:26:41 PM	SiCl4 post valve closed
1/2/2011	11:26:41 PM	Main Vac valve closed
1/2/2011	11:26:41 PM	Bypass valve closed
1/2/2011	11:26:41 PM	Bubbler valve closed
1/2/2011	11:26:41 PM	Helium MFC set to  0.000000
1/2/2011	11:26:41 PM	H2 MFC set to  0.000000
1/2/2011	11:26:41 PM	BCl3 MFC set to  0.000000
1/2/2011	11:26:41 PM	PHl3 MFC set to  0.000000
1/2/2011	11:26:41 PM	SiCl4 MFC set to  0.000000
1/2/2011	11:26:41 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:26:42 PM	Tube furnace set to 0
1/2/2011	11:26:42 PM	Run finished at 11:26 PM
1/2/2011	11:30:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2011	11:30:29 PM	Recipe started at 11:30 PM
1/2/2011	11:30:29 PM	Helium valve closed
1/2/2011	11:30:29 PM	H2 valve closed
1/2/2011	11:30:29 PM	BCl3 valve closed
1/2/2011	11:30:29 PM	PH3 valve closed
1/2/2011	11:30:29 PM	SiCl4 pre valve closed
1/2/2011	11:30:29 PM	SiCl4 post valve closed
1/2/2011	11:30:29 PM	Main Vac valve closed
1/2/2011	11:30:29 PM	Bubbler valve closed
1/2/2011	11:30:29 PM	Bypass valve opened
1/2/2011	11:30:29 PM	Helium MFC set to  0.000000
1/2/2011	11:30:29 PM	H2 MFC set to  0.000000
1/2/2011	11:30:29 PM	BCl3 MFC set to  0.000000
1/2/2011	11:30:29 PM	PHl3 MFC set to  0.000000
1/2/2011	11:30:29 PM	SiCl4 MFC set to  0.000000
1/2/2011	11:30:29 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:30:29 PM	Tube furnace set to 0
1/2/2011	11:31:28 PM	Helium valve closed
1/2/2011	11:31:28 PM	H2 valve closed
1/2/2011	11:31:28 PM	BCl3 valve closed
1/2/2011	11:31:28 PM	PH3 valve closed
1/2/2011	11:31:28 PM	SiCl4 pre valve closed
1/2/2011	11:31:28 PM	SiCl4 post valve closed
1/2/2011	11:31:28 PM	Bubbler valve closed
1/2/2011	11:31:28 PM	Main Vac valve opened
1/2/2011	11:31:28 PM	Bypass valve opened
1/2/2011	11:31:28 PM	Helium MFC set to  0.000000
1/2/2011	11:31:28 PM	H2 MFC set to  0.000000
1/2/2011	11:31:28 PM	BCl3 MFC set to  0.000000
1/2/2011	11:31:28 PM	PHl3 MFC set to  0.000000
1/2/2011	11:31:28 PM	SiCl4 MFC set to  0.000000
1/2/2011	11:31:28 PM	Bypass solenoid MFC set to  0.000000
1/2/2011	11:31:28 PM	Tube furnace set to 0
1/2/2011	11:31:28 PM	Run finished at 11:31 PM
1/2/2011	11:31:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
